Abstract
A novel dual-dome micromechanical resonator and a method for fabricating it into a single or amorphous crystal silicon film layer is demonstrated. An electrostatic effect on the input resonator induces high-frequency resonant mechanical motion in the first dome plate, which is mechanically conducted into the second equivalent dome plate. Transduction from the input resonator to the output resonator is me- chanically performed not by using coupling rods but by overlapping the plates. Oscillations are obtained at 8.5 MHz and 17 MHz when the reso- nator is buffered with a high-impedance junction gate field-effect transis- tor amplifier. © 2010 Society of Photo-Optical Instrumentation Engineers.
Published Version
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