Open Access
https://doi.org/10.1117/1.jmm.19.4.040101

JM3 is Gone, Long Live JM3!

Oct 20, 2020
Journal of Micro/Nanolithography, MEMS, and MOEMS
Harry Levinson +1 more

Show More

Abstract

Translate Article

Take Notes

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Similar Papers

Research Article
10.1049/iet-epa.2017.0301

Guest Editorial

Jul 1, 2017
IET Electric Power Applications
Mario J Duran + 2 more

Guest Editorial

Single Book
10.1520/stp1567-eb

Aug 1, 2012
K Narayan Prabhu

Description Eleven peer-reviewed papers focus on the properties of nanofluid technology including: heat transfer/thermal transport, composition, applications, preparation, and characterization. Nanofluids have extensive applications as coolants in the electronic, nuclear, and heat treatment industry. They also enhance the lubricating properties of oils and reduce emissions in automobiles. Papers cover

Research Article
10.1117/1.1808766

Good News for <inline-formula><math display="inline" overflow="scroll"><msup><mi>JM</mi><mrow><mn>3</mn></mrow></msup></math></inline-formula>

Oct 1, 2004
Journal of Micro/Nanolithography, MEMS, and MOEMS
Burn J Lin

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.2752509

Multimedia in <inline-formula><math altimg="none" display="inline" overflow="scroll"><mrow><msup><mi>JM</mi><mn>3</mn></msup></mrow></math></inline-formula> is a Win-Win for Authors and Subscribers

Apr 1, 2007
Journal of Micro/Nanolithography, MEMS, and MOEMS
Burn J Lin

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.2718964

E-Beam Direct-Write Lithography/Nanoimprint Lithography and Aviation

Jan 1, 2007
Journal of Micro/Nanolithography, MEMS, and MOEMS
Burn J Lin

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.jmm.22.2.020101

An Exciting Time to be a Lithographer

Jun 5, 2023
Journal of Micro/Nanopatterning, Materials, and Metrology
Harry J Levinson

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.3562169

Errata: Microcarrier-controlled-microfluidic chip for microsphere single-pass applications by hot embossing lithography

Jan 1, 2011
Journal of Micro/Nanolithography, MEMS, and MOEMS
Ruixia Yang

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
9
10.1117/1.jmm.11.3.030101

How to Write a Good Scientific Paper: Citations

Aug 7, 2012
Journal of Micro/Nanolithography, MEMS, and MOEMS
Chris A Mack

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.1458964

On the Birth of This Journal

Apr 1, 2002
Journal of Micro/Nanolithography, MEMS, and MOEMS
Burn J Lin

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.jmm.21.1.011001

Special Section Guest Editorial: Novel Patterning Technologies II

Mar 8, 2022
Journal of Micro/Nanopatterning, Materials, and Metrology
Douglas J Resnick + 1 more

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.jmm.21.1.010101

Reflections on the Journal of Micro/Nanopatterning, Materials, and Metrology’s First Year

Jan 20, 2022
Journal of Micro/Nanopatterning, Materials, and Metrology
Harry J Levinson

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.jmm.21.4.041401

Special Section Guest Editorial: Non-chemically Amplified Resists for EUV Lithography

Dec 13, 2022
Journal of Micro/Nanopatterning, Materials, and Metrology
Anuja De Silva + 1 more

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
10.1117/1.3240492

Guest Editorial: Computational Lithography

Jul 1, 2009
Journal of Micro/Nanolithography, MEMS, and MOEMS
Chris Mack

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
3
10.1117/1.jmm.11.2.021101

Special Section Guest Editorial: EUV Sources for Lithography

Jun 13, 2012
Journal of Micro/Nanolithography, MEMS, and MOEMS
Vivek Bakshi + 1 more

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Research Article
17
10.1117/1.jmm.11.2.020101

How to write a good scientific paper: title, abstract, and keywords

Jun 15, 2012
Journal of Micro/Nanolithography, MEMS, and MOEMS
Chris A Mack

The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.

Ask R Discovery
Chat PDF

AI summaries and top papers from 250M+ research sources.

What is the difference between bacteria and viruses?

What is the function of the immune system?

Can diabetes be passed down from one generation to the next?