Abstract
High heat capacity and constant operation temperature make a 2-phase heat remover tool promising for solving high heat dissipation problems in MEMS devices. However, microscale analysis of the flow with the conventional Navier–Stokes equation is inadequate, because the non-continuum effect is important when the characteristic dimension is comparable to the local mean free path. DSMC is a direct, particle-based numerical simulation method that uses no continuum assumption. In this paper, the gas–liquid boundary effects in microchannel flow are studied using this method. Modified DSMC code is used to simulate low-speed flow—under which viscous heating produces no significant temperature change—and MD results are incorporated into the DSMC boundary condition. Steady Couette flow simulation results show that the gas–liquid boundary affects the density distribution and the temperature dependence of the slip velocity. Unsteady simulation results show that mass transfer by diffusion is faster than momentum transfer by collision.
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