Drilling of cylindrical holes in Crown glass by a short-pulse flat-top CO2 laser beam

Abstract

We investigated cylindrical hole drilling in a crown glass with a high thermal expansion coefficient of 94 × 10–7 K−1 and a low melting point of 724 °C using a short-pulse CO2 laser with a flat-top beam, and also examined the drilling characteristics. The short laser pulse consisted of a pulse spike with a pulse width of 276 ns and a pulse tail with a length of 56.9 µs at a repetition rate of 200 Hz. The laser beam had a flat-top profile with an estimated M2 parameter of 13.5 and a diameter of 12.5 mm before a focusing lens. The flat-top beam was focused by the focusing lens, which had a focal length of 12.7 mm, on the glass surface at a focus offset of −0.20 mm to +0.40 mm. The incident flat-top beam produced conical holes at focus offsets of −0.20 mm to 0.00 mm and produced cylindrical holes at focus offsets of +0.20 mm to +0.40 mm. The hole depth of the cylindrical holes was 109 μm to 434 μm, the surface hole diameter was 150 μm to 366 μm, and the aspect ratio, defined as the ratio of the hole depth to the surface hole diameter, was 0.30 to 2.89. The hole depth was influenced by the focus offset and the total irradiation fluence, whereas the surface hole diameter, the taper angle and the ratio of the surface hole diameter to the irradiation diameter were influenced by the focus offset only. The ratio of the surface HAZ (Heat affected zone) diameter to the irradiation diameter was influenced by both the focus offset and the total irradiation fluence.