Influence of pulse-tail energy of short-pulse CO2 laser in drilling of various glasses

Abstract

In a short-pulse CO2 laser based on discharge excitation, there is a pulse tail that depends on the device configuration and operating conditions. The pulse tail is longer than the spike pulse and causes thermal effects such as a crack, heat-affected zones (HAZ), and so on. There are various types of glass having different physical constants related to heat, such as the thermal expansion coefficient and the softening point. Even if the same CO2 laser pulse is radiated onto glass, the processing results may differ depending on the glass material. Four types of glass, namely, crown glass, soda-lime glass, borosilicate glass, and synthetic quartz glass were irradiated with two types of short CO2 laser pulses, one with a large pulse tail and one with a small pulse tail, at a repetition rate of 200 Hz and a fluence per pulse of 22 J/cm2. As the processing characteristics, the ratios of the surface hole diameter and the HAZ diameter to the irradiation diameter, as well as the drilling depth, were investigated. The pulse-tail energy of the short CO2 laser pulses did not affect the surface hole diameter. In the glasses with small softening points of 740 °C or less, the pulse-tail energy of short CO2 laser pulses affected the HAZ with a large number of pulse irradiations with a total irradiation fluence of 2000 J/cm2 or more. The short CO2 laser pulses with a small tail produced a smaller HAZ than the short CO2 laser pulses with a large tail. In drilling with a large number of pulse irradiations, the short CO2 laser pulses with a small tail produced deeper drilling than the short CO2 laser pulses with a large tail. The glass material did not affect the surface hole diameter and the drilling depth. The glass material affected the HAZ.