Abstract
Barcoding the microworld has become a promising tool for Cell Biology. Individual and subpopulation cell tracking is of great interest to evaluate cell behavoir. Nowadays, many micrometer and even nanometer size silicon 3D structures can be fabricated using microelectronics techniques, i.e., Deep Reactive Ion Etching (DRIE). 3D barcodes reading are less sensitive to the spatial orientation of the code respect to the reader. Therefore, the motivation of this work is to produce small biocompatible barcodes for cell studies that could be freely programmed by controlling the DRIE process parameters.
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