Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy

Abstract

Micro–electro–mechanical systems (MEMS)-based optical scanners play a vital role in the development of miniaturized optical imaging modalities. However, there is a longstanding challenge to balance the temporal resolution, field of view (FOV), and systematic fidelity. Here, we propose a double spiral scanning mechanism to enable high-frequency resonant scanning of MEMS scanners without sacrificing imaging quality, and offer a versatile imaging interface for applications in different scenarios. This arrangement, demonstrated by photoacoustic endoscopy, shows that the imaging rate and FOV can be improved by more than 60 and two times, respectively. The proposed method is general to address the limitations of MEMS-based scanning microscopies and can be adapted for various miniaturized imaging modalities, such as endoscopy, intraoperative image-guided surgery, and wearable devices.