Abstract
The distribution of the magnetic field in the facing targets sputtering apparatus have been measured by using a gaussmeter and calculated by computer aided finite element method. The measured radial field distribution at the central plane between two facing targets agreed well with calculated one. It was shown that the size of permanent magnets for confining plasma may influence the strength of magnetic field but may not do the distribution of magnetic flux.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
