Abstract
To control the soft magnetic properties and the magnetic anisotropy of Ni-Fe/Co67Cr33 multilayers, an external field Hex of about 80 Oe was applied to films grown by using a facing-targets sputtering (FTS) apparatus during the deposition of the multilayers. The relative permeability μr of Ni79Fe21/Co67Cr33 multilayers without a Co67Cr33 underlayer was drastically improved in any direction when Hex was applied to the layers in the FTS apparatus. On the other hand, Ni79Fe21/Co67Cr33 multilayers with a Co67Cr33 underlayer revealed good (111) orientation of Ni-Fe crystallites, which had higher μr only in the Hex direction.
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