Abstract

A perpendicular magnetic recording tape requires a high perpendicular magnetic anisotropy field Hk and a small normalized standard deviation of Hk distribution σhw/Hk. Firstly, when a small amount of Ta was added to Co-Cr film as a third element, σhk/Hk decreased from 0.14 to 0.11. Next, when Kr gas was used instead of Ar gas as a sputtering gas, the X-ray diffraction intensity of (002) planes I(002) of Co-Cr-Ta film increased by up to 120%. In addition, σhk/Hk decreased from 0.11 to 0.07.

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