Abstract
Template-based surface nanopatterning techniques are highly efficient methods in realizing different surface nanopatterns, which are the fundamental structures of various nanodevices. We demonstrate a template of pyramidal silicon nanopore array (PSNA) for direct surface nanopatterning. Using the PSNA templates, deposition experiments of platinum (Pt) and gold-palladium (Au-Pd) particles on chromium-coated silicon substrates were performed. Individual Pt nanocubes and nanocube arrays with different shapes and feature sizes as small as 82 nm were obtained. By tuning the gap between the PSNA template and the substrate, Au-Pd microdot arrays with an average diameter of 7.6 μm were also fabricated. As the nanopore size and shape of the PSNA template can be easily controlled, the corresponding size and shape of the transferred surface nanopatterns are tunable. These results indicate the potential of the PSNA templates for large-scale production of nanopatterns with desired sizes and shapes.
Highlights
Over the past decades, the smallest feature size of integrated circuits has become smaller and smaller
By placing the pyramidal silicon nanopore array (PSNA) template on a manipulator, which allows precise threedimensional (3-D) orientation of the template independent of the substrate, step-and-repeat nanopatterning with a space of several nanometers can be realized, just as Taylor et al have done.[25]
The size uniformity in the PSNA template gets worse when the investigation area gets larger, especially when the area is over 1 cm[2], as shown in our previous work.[24]
Summary
The smallest feature size of integrated circuits has become smaller and smaller. Deng et al.: Direct surface nanopatterning using pyramidal silicon nanopore arrays as templates of dry and wet etching, or just a three-step wet etching, as shown in our previous work.[21,22,23] the PSNA template fabrication steps and costs are significantly reduced. As the size and shape of the nanopore in the PSNA template can be tuned, the corresponding size and shape of the surface structures transferred from the template are tunable Based on such PSNA templates, direct surface nanopatternings of platinum (Pt) and gold-palladium (Au-Pd) on chromium-coated silicon substrates by deposition were conducted. Individual Pt nanocubes and nanocube arrays with different shapes and feature sizes as small as 82 nm, as well as Au-Pd microdot arrays with an average diameter of 7.6 μm, were obtained Another factor that may influence the morphology of the deposited patterns is the gap (H) between the template and the substrate. The spatial resolution of the ESEM and the SPM in typical modes was 2.1 and 0.3 nm, respectively
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