Direct numerical reconstruction of inelastic cross sections from REELS and ISS spectra

Abstract

The reconstruction of inelastic scattering cross sections faces two problems: the measured signal (energy spectrum) is a multiple scattering signal; the inelastic energy loss is nonuniform over the target depth. In this paper, we present a method for numerical reconstruction of cross sections from characteristic energy loss spectra, which efficiently solves both problems within a multilayer model. It is shown that the inverse problem of cross section extraction in the three-layer model is ill-conditioned, and the method is practically inapplicable to the three-layer model. The direct numerical reconstruction method yields a strongly “noised” result and can be applied only to obtain a priori information on the inelastic cross section form for further fitting. Using a combination of two methods, inelastic scattering cross sections were reconstructed for aluminum from characteristic energy loss spectra at probe beam energies of 5 and 40 keV. It is shown that ionization in solids should be described as a local process and as a collective one using the dispersion formula similarly to the case of excitation plasmons.