Abstract
This paper presents the design and experimental evaluation of a gyroscope based on differential design of a surface acoustic wave (SAW) resonator and a sensor on a piezoelectric substrate. The resonator is divided into two halves, one with metallic dot arrays and other without any metallic dots. Standing waves are formed inside both cavities. The particles at the antinodes of the standing wave pattern experience large amplitude of vibration that serves as the reference vibrating motion for this gyroscope. The metallic dots strategically positioned at the antinode locations experience Coriolis force due to rotation and acoustically amplify the magnitude in the orthogonal direction. However, the other half of the resonator cannot generate any secondary SAW. A wideband SAW sensor arranged orthogonal to the SAW resonator picks up these two secondary SAWs and is fed to a differential amplifier. Any drift in the gyroscope signal can be completely eliminated by this novel design. The performance of this 74.2-MHz gyroscope shows very high sensitivity and dynamic range, which is ideal for many commercial applications. Unlike other MEMS gyroscopes, this gyroscope has a planar configuration with no suspended resonating mechanical structures, thereby being inherently robust and shock resistant.
Published Version
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