Abstract

Polycrystalline BaTiO3/Ba0.2Sr0.8TiO3 multilayer thinfilms were fabricated by pulsed laser deposition onto Pt/Ti/SiO2/Sisubstrates with various stacking periodicities. The dielectric constant ofthe films was obviously enhanced with the decrease of the individual layerthickness, while the dielectric loss was kept at a low level comparable tothat of the pure Ba0.6Sr0.4TiO3 thin films. TheMaxwell-Wagner model is used to explain the experimental data.

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