Abstract
Methods of dielectric analysis have been employed to investigate the frequency dispersion of InP-oxide dielectric in MOS and MOM devices. The Cole-Cole empirical method has indicated a wide range of relaxation time for the interfacial polarization. This has been interpreted in terms of a model of carrier injection from the gate metal into the oxide gap states. The model is proposed in conjunction with the anomalous hysteresis in the MOM C-V characteristics and could be applied to other MIS systems.
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