Abstract
Totally oil-free diaphragm pumps with optimized cylinder geometry and minimum dead volume are able to provide an ultimate pressure of 2 mbar and high volume flow rate. These extraordinary attributes rise to a large field of applications. The use of the diaphragm pumps as fore-pumps for systems with cryo-, turbomolecular and iongetter pumps opens the door to oil-free high and ultra-high vacuum systems. Possible applications in nuclear physics are for example evacuation of target chambers at accelerators to avoid carbon contamination on thin targets by backstreaming oil from forepumps or oxidation of target material with the extremely rare and expensive oxygen-17 isotope.
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