Abstract
The poly(ethylene naphthalate) (PEN) substrates have two sides of bare PEN and primer-coated surfaces treated to provide slip property for film production. Although the primer surface showed porous and inhomogeneous morphologies, a hybrid inorganic/organic double-layered barrier layer can effectively improve the surface roughness and permeability. The fabricated amorphous In-Ga-Zn-O thin-film transistors on the PEN substrates with hybrid barrier showed good performances and did not experience any degradation under the mechanical bending situation at a curvature radius of 3.3 mm. The variation in the threshold voltage was evaluated to be approximately −0.1/1.6 V under the negative/positive bias stress tests, respectively.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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