Abstract
A new extreme high vacuum, vibration-free cryopump system has been developed. A cryopanel is separated from a refrigerator which is connected by tubes circulating cooled He gas. The tubes are included in an evacuated flexible hose. The flexible hose is fixed to a damper in order to reduce the vibration transmission from the refrigerator. The chamber and the mounting flange of φ 152ICF can be baked up to 250 °C. Pumping speeds of 0.8 m 3/s for H 2 and ultimate pressure of the order of 10 −10 Pa were measured. The vibration of the cryopump was almost one-hundredth of that of a conventional cryopump and the same as that of a magnetically levitated turbo-molecular pump.
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