Abstract
Shave-off depth profiling utilizes a focused ion beam (FIB) micro-machining process to provide the depth profile. This method is a very unique depth profiling for acquiring a depth profile by the shave-off scanning mode (The fast horizontal sweep of FIB is combined with the very slow vertical sweep). Shave-off depth profiling has its own features, absolute depth scale, pin point depth profiling and application for rough surface and hetero interface. However, the shave-off depth profile is affected by the long tail of FIB because shave-off scanning mode has the distinctive position of the primary ion beam against the sample. In this study, we acquired the different shave-off depth profiles by changing the speed of shave-off scan. Then, we estimated the approximate intensity profile of FIB by the change of the depth resolution of experimental depth profiles. By using this estimated intensity profile of FIB, we carried out the deconvolution to remove the influence of the long tails of FIB. As a result, this new data analysis method enables us to reconstruct highly precise calculated depth profile that reflects not the intensity profile of FIB but the true elemental distribution. [DOI: 10.1380/ejssnt.2010.237]
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