Abstract
AbstractHumidity sensors based on QCM (quartz crystal microbalance) have been developed using an anodized alumina thin‐film as a sensing material. An aluminum thin‐film is deposited on a silver‐coated quartz crystal by electron beam deposition and is anodized in an acid solution. The resultant alumina film is porous. The resonant frequency gradually decreases from 5% to 94% relative humidity (RH) and steeply changes near 100% RH. This result shows that the sensor can be used as a dew‐point sensor as well as a humidity sensor. The response times to the humidity changes from 27% to 59% RH and from 59% to 27% RH are less than 5 s. The sensor shows reversible response to some gases such as ethanol, toluene, and acetone vapors in addition to airborne particles such as pollen.
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