Abstract
We developed a high-efficiency source in a capacitively coupled plasma using magnetic resonance wireless power transfer (MRWPT) systems, which has the advantage that the matcher efficiency is very high at low gas pressures (2 mTorr to 20 mTorr) and high density plasmas (about 1 × 1010 cm−3 to 5 × 1010 cm−3). At the non-resonance conditions, most of the RF power is dissipated by the transmitter coil and the plasma is not discharged. However, at the resonance condition, the plasma is discharged as the current flowing through the transmitter coil rapidly decreases, and the matcher efficiency is higher than 90% in all experiments. For analysis, the transformer model with MRWPT systems is developed. The experimental result is consistent with the model, and the results are discussed with the relevant physical mechanisms.
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