Abstract
The topic of this work is the study of direct detection of electrons by Charge-Coupled-Devices (CCD). The aim is to design a detector for the angle and energy-selective detection of signal electrons in very low energy scanning electron microscopy (VLESEM), using an electron-bombarded CCD sensor (EBCCD). We concentrate upon two problems—the design of appropriate electronics and determination of an appropriate energy of the signal electrons for the CCD sensor.
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