Abstract
A new low energy scanning analytical microscope (LeSAM), combining scanning electron microscopy (SEM), scanning low energy electron microscopy (SLEEM), Auger electron spectroscopy (AES) and scanning Auger mapping (SAM), was realized using a new mini-electron column in conjunction with a cylindrical mirror analyser (CMA). The SLEEM mode of operation uses a cathode lens in which the specimen is negatively biased. In this arrangement, electrons pass through the microscope at high energy and are decelerated to a low incidental energy at the specimen. A novel 6 segment angular resolved in-lens detector is employed for signal detection. The new mini-electron column in SLEEM mode gives high resolution for primary incident beam energies of a few eV. For AES and SAM modes of operation a 6 segment angular resolved detector is also employed for signal detection.
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