Abstract

A metal insulator semiconductor field effect transistor (MISFET)-type sensor for the detection of CO 2 dissolved in aqueous solution is presented. This all-solid-state device is based on a Pt–NiO thin film as active sensing material on the top of a gate electrode. The fabrication of the sensor is described and its performance is characterized. In particular the transient characteristics and response curves at different biases V RS versus the amount of dissolved CO 2 are presented. The sensor shows a linear response to the logarithm of the concentration of dissolved CO 2 at room temperature.

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