Abstract
We show correlation of microscopic surface quality and morphology of nanocrystalline diamond films as a function of deposition temperature and post-growth acid treatment detected by atomic force microscopy in phase detection regime, X-ray photoelectron spectroscopy, X-ray induced Auger electron spectroscopy, Scanning Electron Microscopy, Raman spectroscopy, and the electrical conductivity of H-terminated diamond surfaces. The correlation reflects the decrease in sp 2 amount and enhanced surface conductivity of the diamond surface after the chemical treatment. These results indicate that the AFM phase can detect clearly and microscopically carbon sp 2 phase on facets and grain boundaries of nanocrystalline diamond films.
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