Chapter 8 - Hydrogen Chemistry on Diamond Surfaces: Adsorption, Desorption, and Vibrational Spectroscopy

Abstract

This chapter discusses adsorption, desorption, and vibrational spectroscopy. Hydrogen atom is an indispensable ingredient in diamond fabrication through the chemical vapor deposition (CVD) process. A large flux of atomic hydrogen is essential for the growth of high quality diamond films via the conventional CVD process. Although most of the diamond applications are based on its bulk properties, its unique surface properties provide feasibility in fabricating electrical devices. The reaction of hydrogen with a diamond surface can be used as a model for understanding the fundamental mechanisms of adsorption-induced geometrical changes in the surface structure. The chapter includes a collection of selected studies on hydrogen chemistry on diamond surfaces. The techniques described in the chapter include low energy electron diffraction (LEED), infrared spectroscopy (IRS), sum frequency generation spectroscopy (SFG), high resolution electron energy loss spectroscopy (HREELS), scanning tunneling microscopy (STM), atomic force microscopy (AFM), helium atom scattering (HAS), temperature programmed desorption (TPD), and isothermal desorption. The results from Auger spectroscopy and X-ray photoelectron spectroscopy (XPS), are also discusses in this chapter. The chapter also discusses the anisotropic etching effect of hydrogen on diamond surfaces.