Design, fabrication and performance evaluation of a vaporizing liquid microthruster

Abstract

A recent application domain of MEMS technology is in the development of microthrusters for micro-/nanosatellites. Among the various types of MEMS microthruster developed so far, the vaporizing liquid microthruster (VLM) has been widely explored for its capability to produce continuously variable thrust in the micro-Newton (µN) to mili-Newton (mN) range. This paper reports the design and experimental validation of silicon MEMS VLM consisting of a microcavity, inlet channel and converging–diverging (C-D) in-plane exit nozzle integrated in two micromachined bonded chips and sandwiched between two p-diffused microheaters, located at the top and bottom surface of the device. Structural configuration was designed using simple analytical equations to achieve maximum thrust force by controlling the inlet propellant flow and heater power of VLM in an efficient way. In addition, a 3D model using a computational fluid dynamics technique was constructed to simulate the aft section of VLM for the investigation of its aerodynamic behavior. The device fabrication and testing have been briefly described. The fabricated VLM is capable to produce 1 mN thrust using maximum heater power of 3.6 W at a water flow rate of 2.04 mg s−1 using an in-plane C-D exit nozzle of throat area 130 µm × 100 µm. A detailed thrust force measurement was carried out with the variation of input heater power for different mass flow conditions and exit to throat area ratio of the exit nozzle, and the results were interpreted with the theoretical model. The model gives considerable physical insight in the operation of the VLM. Finally, a performance comparison with other published VLM results indicates that the present design can yield comparatively more thrust force with much less input power. A performance comparison with other published VLM results indicates that the present design can achieve improved performance by integrating two heaters with appropriate chamber volume in respect of propellant flow rate and input power for obtaining a supersaturated dry stream.