Abstract
This paper reports a silicon MEMS vaporizing liquid microthruster (VLM) with an internal p-diffused microheater. The device fabrication and testing have been briefly described. The VLM consisting of two micromachined, bonded silicon chips produces thrusts in the range of 5 µN to 120 µN with a heater power of 1 W to 2.4 W at a water flow rate of 1.6 µl s−1 using an exit nozzle of throat size 30 µm × 30 µm. A maximum thrust of 120 µN was produced with a heater power of 2 W at a water flow rate of 0.7 µl s−1 with exit nozzle of throat size 50 µm × 50 µm. The measurement has been carried out using a sensitive cantilever and a laser based lamp-and-scale arrangement. The internal microheater is expected to yield a higher efficiency compared with the external microheater.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
