Abstract
In this paper, design, fabrication and characterization of a resonant magnetic field sensor is presented. The proposed magnetic field sensor consists of a dual-resonator with an induction coil laid on the resonant plate. The dual-resonator array is mechanically coupled together through the λ/2 coupling beam. The dual-resonator design not only increases the induced electromotive force output through summing up the output from individual resonator, but also has a quality factor (Q) boosting effect for the resonator with lower Q in the array. The sensor exploits the principle of electromagnetic induction to detect external magnetic field through the electromotive force in the induction coil. The fabricated sensor is vacuum encapsulated in a ceramic chip carrier in order to reduce the Brownian noise floor for achieving a better performance. Experimental results show that the device offers a sensitivity of 35.92μV/mT and 47.74μV/mT, a scale factor nonlinearity of 0.65% and 1.19% with 30V dc bias and 40V dc bias, respectively.
Published Version
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