Abstract
Abstract The limitations of present types of electrostatic micromotors in silicon that hamper their practical applicability are the relatively large voltages that are needed for the electrostatic drive and the wear arising from the friction between the rotor and the stator during rotation. Replacing the polysilicon rotor by an insulating rotor with implanted permanent charge packets (electrets) would provide a solution to these problems, as it allows propulsion with smaller drive voltages and an electrostatic levitation and lateral alignment of the rotor in order to obtain an effective contactless bearing. This paper discusses the effectiveness of the permanent-rotor-charge drive and the implementation of a contactless electrostatic bearing for both the vertical and lateral alignment of the rotor. The application area of the basic version of such a micromotor is restricted to non-mechanical-contact devices such as optical choppers.
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