Abstract
The authors are developing electrostatic levitation systems as a non-contact bearing to solve the problems that are caused by large friction force and rapid wear in high vacuum. This paper reports three experimental results that support good feasibility for practical application of electrostatic levitation in vacuum chambers. First, and aluminum disk that weighs 442g is experimentally levitated to confirm that electrostatic levitation force in vacuum is strong enough to levitate objects such as positioning tables and conveyer carriages. Secondly, to reduce the cost for amplifiers, which are essentially employed in the systems, a voltage application method that utilizes amplifiers, constant DC voltage suppliers and smooth input profile is introduced. This method successfully reduces output voltage range of amplifiers by a factor of about eighth. Thirdly, to apply electrostatic levitation technology to more practical systems such as conveyers, an electrostatic levitation system that constrains the whole motions of its levitated body except one axis of translational motion on horizontal plane.
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