Abstract
In this study, a microelectromechanical system (MEMS) beam is experimentally released from pull-in using electrostatic levitation. A MEMS cantilever with a parallel plate electrode configuration is pulled-in by applying a voltage above the pull-in threshold. An electrode is fixed to the substrate on each side of the beam to allow electrostatic levitation. Large voltage pulses upwards of 100 V are applied to the side electrodes to release the pulled-in beam. A large voltage is needed to overcome the strong parallel plate electrostatic force and stiction forces, which hold the beam in its pulled-in position. A relationship between bias voltage and release voltage is experimentally extracted. This method of releasing pulled-in beams is shown to be reliable and repeatable without damaging the cantilever or electrodes. The proposed approach is of great interest for any MEMS component that suffers from the pull-in instability, which is usually irreversible and permanently destroys the device, as electrostatic levitation allows pulled-in structures to be released and reused. It has a promising application in MEMS switches by creating a normally closed switch as opposed to current MEMS switches, which are normally open.
Highlights
Microelectromechanical Systems (MEMS) are of key importance for a large number of commercial devices and are heavily relied upon to achieve the performance required by the manufacturer and consumer alike
With increasing demand for ”smart” devices that can interact with the environment and their user, the demand for highly functional and reliable MEMS devices is expanding
In many cases pull-in results in permanent damage to the device as the electrodes become stuck together and can not be separated even if the voltage is removed. The stiction forces such as van der Waals become much more significant at the micro-scale, and the parallel plate electrostatic force is only capable of pulling objects together, so release is often impossible[15]
Summary
Follow this and additional works at: https://orb.binghamton.edu/mechanical_fac Part of the Mechanical Engineering Commons. Towfighian, A Reliable MEMS Switch Using Electrostatic Levitation, Applied Physics Letters, 113(22), pp. Mark Pallay[1] and Shahrzad Towfighian[1], a) Mechanical Engineering Department, Binghamton University 4400 Vestal Parkway East Binghamton, New York, 13901. A relationship between bias voltage and release voltage is experimentally extracted This method of releasing pulled in beams is shown to be reliable and repeatable without causing any major damage to the cantilever or electrodes. This is of great interest for any MEMS component that suffers from the pull-in instability, which is usually irreversible and permanently destroys the device, as it allows pulled-in structures to be released and reused. PACS numbers: Valid PACS appear here Keywords: MEMS, Electrostatic Levitation, Pull-in instability, Release, Switch
Sign-in/Register to view highlights & summary 
Submitted Version (
Free)
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call