Abstract
A junctionless (JL) fin field-effect transistor (FinFET) structure with a Gaussian doping distribution, named the Gaussian-channel junctionless FinFET, is presented. The structure has a nonuniform doping distribution across the device layer and is designed with the aim of improving the mobility degradation caused by random dopant fluctuations in JL FinFET devices. The proposed structure shows better performance in terms of ON-current (\(I_{\mathrm{ON}}\)), OFF-current (\(I_{\mathrm{OFF}}\)), ON-to-OFF current ratio (\(I_{\mathrm{ON}}{/}I_{\mathrm{OFF}}\)), subthreshold swing, and drain-induced barrier lowering. In addition, we optimized the structure of the proposed design in terms of doping profile, spacer width, gate dielectric material, and spacer dielectric material.
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