Abstract
The paper presents a novel Si-substrated micro-hotplate for gas sensor. Use platinum filament as heater, SiO2 as thermal and electricity insulation. Through optimizing analysis, in order to make the gas sensor obtain perfect properties of higher temperature and uniform temperature distribution, the thickness of SiO2, thickness of Si substrate, electrode width and electrode space are designed to be 50, 250, 20 and 500 μm, respectively. Via the analysis of magnetic field distribution of the new gas sensor, the new electrode structure can eliminate the interference on the measurement signal from magnetic field, which is benefit for the improvement of sensor performance.
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