Abstract
A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 μm, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.
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