Abstract
A new kind of electrode was designed for micro-structural gas sensor based on silicon substrate. The temperature distribution was simulated by means of finite element analysis tool ANSYS, in order to obtain higher temperature and uniform temperature distribution in the micro-gas sensor, the thickness of SiO2, thickness of Si substrate, electrode width and electrode space is designed to be 50, 250, 10 and 350 µm, respectively. The magnetic field distribution was also analyzed by ANSYS, and the results show that the new electrodes can eliminate the magnetic field from the heater on the measurement signal interference, which is benefit for the improvement of sensor performance.
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