Abstract
Since most of XY positioning stages with large travel range proposed by former researchers suffer from loose structure and low out-of-plane payload, this article presents a novel monolithic paralle...
Highlights
In some special applications such as ultraviolet nanoimprint lithography (UV-NIL) and soft-contact lithography,[8] it is expected that the XY centering positioning stage does act as a positioning device with large travel range but can carry large out-of-plane payload without any other auxiliary supporting equipment
This article is concentrated on the design and development of a XY compliant positioning stage which has large travel, compact structure, and high out-of-plane payload capacity
The major contribution of this article lies in the design and modeling of a novel spatial parallel XY stages (SPXYSs) based on the spatial PP joint, which owns integrated merits of large travel range, compact size, and high out-of-plane payload capacity
Summary
Compliant positioning stages possess many merits, such as reduced number of parts, no friction, no backlash, and free of lubrication,[1,2] which make them widely used in the fields of micro-manufacturing, optical fiber alignment, biological engineering, scanning probe microscopy (SPM), and lithography.[3,4,5,6,7] But in some special applications such as ultraviolet nanoimprint lithography (UV-NIL) and soft-contact lithography,[8] it is expected that the XY centering positioning stage does act as a positioning device with large travel range but can carry large out-of-plane payload without any other auxiliary supporting equipment. This article is concentrated on the design and development of a XY compliant positioning stage which has large travel, compact structure, and high out-of-plane payload capacity. The stage proposed by Hao meets the requirement of large travel range (20 3 20 mm[2] motion range), compact structure (area ratio: 0.14%), and high out-of-plane payload capacity. Inspired by the aforementioned researcher’s work, a novel PXYS is presented in this article It can deliver a large travel and sustain high out-of-plane payload, while maintain compact structure due to the usage of spatial PP joint and the conformal design of voice coil motors (VCMs). The major contribution of this article lies in the design and modeling of a novel SPXYS based on the spatial PP joint, which owns integrated merits of large travel range, compact size, and high out-of-plane payload capacity. Where Rlsj is the rotation matrix of the jth parallelogram’s local coordinate with respect to the leg coordinate, given as
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