Abstract
Abstract. This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special applications such as Ultra-Violet Nanoimprint Lithography and soft-contact lithography. Different from conventional compliant positioning stages, the proposed SPXYS consists of a monolithic spatial parallel linear compliant mechanism (SPLCM) driven by four matching designed voice coil motors (VCMs). The moving platform of the stage is connected to the base by four spatial prismatic-prismatic (PP) joints, which are enveloped from planar PP joint based on the position space reconfiguration (PSR) method to realize desired travel range, payload capacity and compact size. The mechatronic model of the SPXYS is established by integrated using matrix structural analysis (MSA) and the method of images. The design flow chart of the SPXYS is given based on the key parameter sensitivity analysis. Furthermore, a reified SPXYS is designed and manufactured. The analytical design of the stage is confirmed by experiments. The reified stage has a travel range of 20.4 × 20.6 mm2, a compact structure with area ratio 1.87 %, and the resonant frequencies of the two working modes at 22.98 and 21.31 Hz. It can track a circular trajectory with the radius of 4.5 mm. The root mean squares (RMS) tracking error is 2 µm. The positioning resolution is 100 nm. The payload capacity test shows that the reified stage can bear 20 kg out-of-plane payload.
Highlights
Compliant positioning stages (CPSs) possess many merits, such as reduced number of parts, no friction, no backlash and free of lubrication (Howell, 2001; Smith, 2000), which make them have extensive applications such as micro manufacturing, optical fiber alignment, biological engineering, scanning probe microscopy (SPM) and lithography (Yong et al, 2012; Kenton et al, 2012; Chen et al, 1992; Muthuswamy et al, 2002)
The moving platform of the stage is connected to the base by four spatial PP joints, which are enveloped from planar PP joint based on the position space reconfiguration (PSR) method to realize desired centimeter travel range, compact structure, as well as high out-of-plane payload capacity
The designed spatial parallel XY stage (SPXYS) is suitable for precision positioning applications, such as Ultra-Violet Nanoimprint Lithography (UVNIL) and soft-contact lithography, which expect a compact compliant positioning stage has large travel range, and large out-of-plane payload carrying capacity without any other auxiliary supporting equipment
Summary
Compliant positioning stages (CPSs) possess many merits, such as reduced number of parts, no friction, no backlash and free of lubrication (Howell, 2001; Smith, 2000), which make them have extensive applications such as micro manufacturing, optical fiber alignment, biological engineering, scanning probe microscopy (SPM) and lithography (Yong et al, 2012; Kenton et al, 2012; Chen et al, 1992; Muthuswamy et al, 2002). This article is concentrated on the design and development of a compliant XY position stage which has large travel range, compact structure, high out-of-plane payload capacity and matching design of voice coil motors (VCMs). Different from conventional compliant positioning stages, the proposed SPXYS consists of a monolithic SPLCM driven by four matching designed VCMs. The moving platform of the stage is connected to the base by four spatial PP joints, which are enveloped from planar PP joint based on the position space reconfiguration (PSR) method to realize desired centimeter travel range, compact structure, as well as high out-of-plane payload capacity. The designed SPXYS is suitable for precision positioning applications, such as Ultra-Violet Nanoimprint Lithography (UVNIL) and soft-contact lithography, which expect a compact compliant positioning stage has large travel range, and large out-of-plane payload carrying capacity without any other auxiliary supporting equipment.
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