Design and investigation of triple metal gate engineering of charge plasma based TFET for biomolecule detection

Abstract

The current manuscript introduces a dielectric regulated charge plasma based Triple metal Gate Tunnel Field Effect Transistor (CPB-TG-TFET) biological sensor. In which a nano-cavity is introduced below the gate and source electrode to detect the biological molecules like amino acids (AAs), protein, etc. The proposed P + and N + regions are contrived depending upon the electrode’s work function on the device’s silicon body. The effects of metal electrode work function modulation, gate electrode length variation and gate oxide thickness variation are analyzed for improving band-to-band tunneling efficiency at the source- channel transition. The proposed structure shows noticeable sensitivity results for neutral and charged biomolecules. The sensitivity of the neutral biomolecules having higher dielectric constant(Kp) is observed higher; the surface potential sensitivity of the Gelatin (Kp = 14) is estimated as 3.×1010 which is 13% and 35% higher than the sensitivity of Keratin (Kp = 10) and Bacteriophage T7 (Kp = 5) respectively at the cavity length of 30 nm.