Abstract
ABSTRACTA novel silicon fiber-optic temperature sensor based on a 1D photonic crystal is theoretically discussed in this paper. The sensing element consists of a 1D photonic crystal with a central defect at the end of a U-groove that can be created in a silicon substrate by silicon deep etching which facilitates the integration of fiber-optic and sensor in a single silicon die. Temperature variations can be monitored by scanning the shift in wavelength of reflection peak, which is induced by the thermo-optic effect and thermal expansion effect. This sensing configuration shows a nearly linear temperature response over the large temperature range of 0–200°C with a sensitivity of 68 pm/°C that is seven times better than the conventional FBG sensors.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call