Abstract
Various ion beam techniques are currently in use to measure the elemental concentration profile as a function of depth in a solid. At low energies, i.e. ≲ 10keV, the techniques include sputter-induced photon spectrometry (SIPS), secondary ion mass spectrometry (SIMS) and ion scattering spectrometry (ISS). When the primary ion energy increases to several MeV, the accelerator-based techniques such as Rutherford backscattering spectrometry (RBS), elastic recoil detection (ERD) and resonant nuclear reaction analysis (NRA) are very useful for depth profiling. Examples of the application of these techniques to study glass and ceramic materials are given in this report and the relative merits of the techniques are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
