Abstract
Concentration-depth profiles of two multilayer sandwich structures composed of alternate layers of Ni and Cr (ten layers 370 Å thick and twenty layers 115 Å thick respectively) with initial surface roughnesses of not greater than 100 Å and approximately 1 μm were obtained by sputtering with 1 keV argon ions and simultaneous Auger electron spectroscopy. Comparison with calculations according to a sequential layer sputtering model shows that the information depth influence is negligible for a sputter depth of more than about 300 Å. The original surface roughness has an appreciable influence on depth resolution, which leads to increasing interface broadening with sputter depth.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
