Abstract

This paper deals with the explanation and/or description of a deposition method of cubic boron nitride film currently being developed by the authors, in which a hot-cathode plasma discharge in a parallel magnetic field is used in an activated reactive evaporation process, and the various characteristics of the film measured and identified using well-established methods such as X-ray diffraction, ir absorption spectroscopy and electron-diffraction analysis. In this paper, to clarify the tribological properties of the c-BN film, the friction and wear behaviour of the film, particularly when it came into contact with diamond were also investigated. The results showed that the friction coefficient of the c-BN film against the diamond indenter tended to decrease as the load increased and was very low, exhibiting values of ∼ 0.03-0.065. The friction performance of the c-BN film also proved to be significant, with high wear and peeling resistances in the case of contact with the diamond.

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