Deposition of Antimony and Antimony Oxides by MOCVD

Abstract

AbstractThin films of antimony and antimony oxides have been deposited by metal–organic (MO) CVD from a variety of metal–organic precursors at temperatures in the range 150–650 °C under both atmospheric and reduced pressure. Below 400 °C, uniform films of pure senarmontite (Sb2O3) with a microstructure and crystal texture that was strongly dependent on the deposition temperature, were deposited. Above 400 °C, mixed phase material was produced, with isolated crystallites of pure antimony becoming the dominant phase as the temperature was increased. The maximum temperature at which pure senarmontite could be formed was higher for larger precursor ligands. Addition of oxygen to the precursor flow led to the production of higher antimony oxidation states.