Abstract
This paper demonstrates the reliability of SiC vertical trench junction field-effect transistors (VJFET). Measurements are shown which prove that the device’s intrinsic gate-source pn junction is immune to degradation associated with recombination-enhanced dislocation glide. And after subjecting VJFETs to 1,000 hours of high-temperature bias stress, no measured parameter deviated from datasheet specifications. These results reflect the maturity and reliability of SemiSouth’s SiC VJFET technology, as well as tight process control over device parameters that are critical to circuit design and long-term system operation.
Published Version
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