Abstract
The elastic moduli, microhardnesses, and deformation coefficients of aluminum films and bulk materials (Al, Si, Bi, and Ti) are determined using a combination of indentation and atomic force microscopy methods. The surface morphology of aluminum films with a thickness of 10, 200 and 1000 nm on silicon substrates is studied in the initial state and after indentation with loads in the range from 2 to 100 g. The stages of the fragmentation and agglomeration of grains under the influence of loads are revealed experimentally. The effect of the initial grain size, film substructure, and load values on the processes of deformation structuring is determined.
Published Version
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