Abstract
Phosphoric acid between 140° and 170°C has been used to reveal strain and chemical heterogeneities in nonmagnetic garnet substrates and magnetic garnet epitaxial films, principally and , respectively. Dislocations, growth striations, and residual polishing damage have all been observed. Dislocations perpendicular to the film‐substrate interface in (111) films were shown to be generated by inclusions whether at the interface or in the interior of the film. Dislocations in the substrate will also propagate into the layer. Interface or misfit dislocations were not observed either by etching or x‐ray transmission and reflection topography.
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