Abstract
Cylindrical shell fused silica resonators coated with 8 axisymmetric Pb(Zr0.53Ti0.47)O3 (PZT) thin film electrodes (thickness ~2 μm) were reported. The resonators were firstly designed and fabricated, then annealed and processed by chemical etching to increase mechanical quality factor (Q factor) of resonators, which achieved as high as 2.89 million for n = 2 wineglass modes after being coated with PZT thin film electrodes. The n = 2 wineglass modes of the resonators were driven by PZT thin film electrodes in experiment and simulation with fine vibratory shape, which demonstrated the feasibility of the cylindrical fused silica resonator driven by PZT thin film electrodes. The application of PZT thin film electrodes to drive and detect cylindrical shell fused silica resonator can significantly improve Q factor of resonators and improve the sensitivity of Coriolis Vibratory Gyroscope (CVG).
Highlights
Gyroscopes are key components of inertial navigation systems for detecting the angular motion of objects
Fused silica cylindrical shell resonators driven by PZT thin film electrodes was investigated, and two novel structures of resonators were designed and fabricated to meet the requirements of film coating
The results demonstrated that the resonator without bottom holes was more suitable for coating with PZT thin film electrodes
Summary
Gyroscopes are key components of inertial navigation systems for detecting the angular motion of objects. Cylindrical shell resonators driven by PZT thin film electrodes were proposed and investigated through simulations and experiments in this paper, and the hypothesis that fused silica resonators can be driven effectively while maintaining a high Q factor after coating with PZT thin film electrodes was tested. In 2010, Aktakka et al reported the high performance of the piezoelectric energy collector based on PZT thin film electrodes They suggested the possibility of using PZT thin film technology to produce high-efficiency vibration actuators. Compared with the traditional technical scheme, the positioning accuracy of coating PZT thin film electrodes is higher, which may greatly reduce the asymmetry drift error and has potential to help develop the CRG with high precision, small size and low cost
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