Abstract
AbstractYMnO3 thin films were sputtered on Si (100) substrates under different ambient conditions. After rapid thermal annealing process at 850 °C, the YMnO3 film deposited in Ar ambient had random orientations and the YMnO3 film deposited in Ar+O2 ambient was crystallized with distinct two layers, i.e., c-axis oriented layer in top region and random oriented layer in bottom region. Relations between the microstructure and the electrical properties of Pt/YMnO3/Si capacitor were investigated. Memory window and leakage current depended on the orientation of the YMnO3 thin films and the interfacial microstructure of the YMnO3/Si, respectively
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