Abstract

Hexagonal Ba-ferrite films have been prepared at room temperature by facing targets sputtering(FTS) system and they were annealed to crystallize at 900°C in air. In this paper, the dependence of the annealing time on grain size of post-annealed Ba-ferrite films has been studied. It was found that the annealing time of 45sec is sufficient for the crystallization without apparent grain growth under the temperature of 900°C and the post-annealed Ba-ferrite films exhibit isotropic magnetic property.

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